Springer

Russian Microelectronics

(ISSN 1608-3415)

Russian Microelectronics is an international peer-reviewed journal devoted to technological, physical, and circuit engineering aspects of micro- and nanoelectronics. Special attention is paid to new trends in lithography (optical, X-ray, electron, ion), etching, doping, deposition, and planarization at the submicron and nanometer scales. A significant place is given to beam and plasma technologies, including molecular beam epitaxy and dry etching, as well as methods of investigation and control of surfaces and multilayer structures. Mathematical modeling and real-time diagnostics of technological processes are discussed. Articles on semiconductor devices based on new physical principles, such as quantum dimensional effects and superconductivity, are published. This research area covers heterostructures, nanotransistors, and semiconductor implementations of quantum bits (qubits). The journal welcomes manuscripts from all countries.